Polymer Glasses
25944円

＜P＞ThefocusofthisbookistomergethecomplexCMPmodelsandmechanismsthathaveevolvedinthepastdecadewithrecentexperimentalresultswithcopperandlow-dielectricconstant(low-andhigh-removal-rateprocesses.Theresultisamorein-depthlookintothefundamentalreactionkineticsthatalter,selectivelyconsume,andultimatelyplanarizeamulti-materialstructureduringDamascenepatterning.＜/P＞Assemiconductormanufacturersimplementcopperconductorsinadvancedinterconnectschemes,researchanddevelopmenteffortsshifttowardtheselectionofaninsulatorthatcantakemaximumadvantageofthemainchallengestointegratingalow-dielectricconstant(low-kappaCMPtodevelopacomprehensivemechanismforlow-andhigh-removal-rateprocesses.Theresultisamorein-depthlookintothefundamentalreactionkineticsthatalter,selectivelyconsume,andultimatelyplanarizeamulti-materialstructureduringDamascenepatterning.Low-kappa)insulatorasareplacementforsilicondioxideisthebehaviorofsuchmaterialsduringthechemical-mechanicalplanarization(CMP)processusedinDamascenepatterning.＜/P＞画面が切り替わりますので、しばらくお待ち下さい。

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Polymer Glasses



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